A Novel Measuring Device for Step Gauge

摘要

Combining laser interferometric comparator with high precision inductance sensor, a novel measuring device for step gauge was developed. A high precision laser interferometer system was used for a length standard; a zero-crossing trigger signal of inductance sensor output voltage was used for the aiming signal. In order to improve the measuring accuracy, several high precision sensors were installed to measure environmental parameters for compensating the laser wavelength according to the Edlen empirical equation. A rotating mechanism was designed. Two key problems, probe obstacle avoidance and aiming repeatability, were solved. Experimental analysis of the contact force and speed of influence on measuring probe repeatability, and a segmented control method of the movement speed was established. The experiment indicates that the system has a high accuracy of measurement, which can be used for contact measurement of other one dimension length standard.