Study On Algorithm Of Dwell Time In Ion Beam Figuring Based On RBF Neural Network

摘要

Give the figures, which describe the relation between Ion Beam Figuring parameters(Ion beam density, energy, incident angle) and removal features based on SRIM software, the beam removal function model is built and proposed an algorithm of dwell time using RBF neural network optical controlling removal function and processing route. Then, Analyzed the error of algorithm and did some related compensation researches. Results showed that under a certain accuracy, the proposed algorithm can greatly speed up, control more optimization, make the IBF technology more practical, promoting the further development of the super precision optical surface processing technology.