Measurement of Z-Axis Deviation Angle of Electro-Optic Crystal by Conoscopic Interference

摘要

Properties of plasma electrode pockels cell is directly affected by the Z-axis deviation angle of the electro-optic crystal. Therefore, high precision measurement of the Z-axis deviation angle is indispensable. By using conoscopic interference technique, a measurement system for Z-axis deviation angle of electro-optic crystal is introduced. The principle of conoscopic interference method is described in detail, and a series of techniques are implied in this measurement system to improve the accuracy. High-precision positioning method of the crystal based on Michelson interference is proposed to determine the normal consistency of crystal, which can ensure the high positioning repeatability of crystal in the measurement process. The positioning comparison experiment of the crystal shows that the standard deviation of our method is less than lpixel, which is much better than the traditional method (nearly 4pixels). Moreover, melatope extraction algorithm of optical axis based on image matching technique is proposed to ensure the melatope can be extracted in high precision. Calibration method of the normal of transmission surface of crystal is also proposed. The experiment results show that the PV and rms of Z-axis deviation angle is less than 0.05mrad and 0.02mrad, respectively. The repeatability accuracy is less than 0.01 mrad.