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Characteristic of e2v CMOS Sensors for Astronomical Applications

机译:用于天文应用的e2v CMOS传感器的特性

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We report the testing result of e2v CIS 107 CMOS sensor for temperature from 300K to 170K. The CIS 107 sensor is a prototype device with 10 different variations of pixel designs. The sensor has 1500 × 2000, 7 μm pixels with 4 outputs. Each variation covers 1500 × 200 pixels. These are 4T pixels with high resistivity epitaxial silicon and back thinned to 11μm. At room temperature, the several variants of pixels show peak QE higher than 90%, readout noise around 5e- and dark current around 50e-/s/pix. The full well is about 15000 e- due to the limitation of the transfer gate capacitor. The CIS 107 device was further characterized at different device temperatures from 170K to 300K. The readout noise decreases and the full well increases as the device is operated at lower temperature.
机译:我们报告了e2v CIS 107 CMOS传感器在300K至170K温度下的测试结果。 CIS 107传感器是具有10种像素设计变化的原型设备。该传感器具有1500×2000、7μm像素和4个输出。每个变体覆盖1500×200像素。这些是具有高电阻率外延硅的4T像素,背面薄至11μm。在室温下,几种像素变体的峰值QE均高于90%,读出噪声约为5e-,暗电流约为50e- / s / pix。由于传输门电容器的限制,全阱约为15000 e-。 CIS 107器件的特征还在于170K至300K的不同器件温度。当设备在较低温度下工作时,读数噪声会降低,而全井则会增加。

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