Novel MEMS Position Sensors for Aerospace Applications

摘要

In the present paper, we propose novel MEMS potentiometers for harsh environment applications and design improvements to enhance the performance of the proposed potentiometers are derived. In conventional potentiometer designs, the resistive elements are exposed to the atmosphere. This exposure results in oxidation and a chemical reaction with ambient gas at a high temperature. Further, the resistive elements can be damaged by the brush that is in direct contact with the surface of the resistive element. In order to overcome these disadvantages associated with conventional potentiometers, novel MEMS potentiometers were designed that focus on the protection of the resistive elements and the high-temperature materials for the components. The proposed potentiometers can be easily realized at a relatively low cost by using the batch production process of the MEMS technologies. Further, improvement of the spatial resolution of the proposed potentiometers can be achieved by densely integrating the patterns of the resistive elements, contact holes, and contact pads using the MEMS technologies. Two types of the potentiometers were fabricated and a preliminary performance test at room temperature was carried out. The results of the performance test are presented in this paper.