Demonstration of Improvement of Repeatability in Thru-Reflect-Line Calibration Using Precision Probing Technique

摘要

The study demonstrates improvement of measurement repeatability in on-wafer thru-reflect-line (TRL) calibration with precision probing technique. The original probe station and the impedance standard substrate with the special positional standards were fabricated for the demonstration. Error terms of the measurement system regard to directivity, source match, and tracking, were evaluated by TRL calibration algorithm. Finally, measurement repeatability in evaluation of the capacitance of air open was compared between the precision probing technique and the conventional manual probing technique. The precision probing technique showed improved repeatability compared to the manual probing technique. This improvement was considered to be associated with reduced variations of the directivity by eliminating variation of the probe position.