High performance InP based single photon avalanche diodes integrated with Metal-Insulator-Metal plasmonic microcavities

摘要

A Metal-Insulator-Metal (MIM) plasmonic optical microcavity is proposed to be integrated with an InP based single photon avalanche diode (SPAD). The MIM microcavity includes a large top metallic grating to couple incident light into the cavity and a small bottom metallic grating to couple the light into the APD, which provides a possibility to improve the SPAD's performance through decreasing the photosensitive diameter of the APD to several μms, while keeping the high quantum efficiency.