Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive

摘要

This work aims at the development of a fast nanometer positioning system, combining the high speed capability of an ultrasonic piezomotors (resonant mode) with the fine positioning capability of a piezostacks (direct-drive mode). The two modes can be operated simultaneously with capability of achieving speed of more than 200 mm/s and positioning accuracy of 10 nm.