首页> 外文会议>Spanish Conference on Electron Devices >Nanoscale morphology of graphene on different substrates
【24h】

Nanoscale morphology of graphene on different substrates

机译:图石墨烯的纳米级形态

获取原文

摘要

Graphene layers can be used as the conductive channel in metal oxide semiconductor field effect transistors, metallic electrodes in capacitors, etc. However, when graphene is grown by chemical vapor deposition (CVD), substrate-induced corrugations and strain-related wrinkles formed on the graphene layer impoverish the properties of these devices by lowering the conductance and increasing their variability. In this work, different nanoscale experimental techniques have been used to investigate the morphology of as-grown and transferred graphene sheets on different substrates. We show that while the compressive strain (from the growth process) in the graphene sheet on flat substrates is minimized by generating wrinkles, on rough substrates it can be minimized by improving the graphene-substrate adhesion, leading to lower densities of wrinkles. This method allows the design of wrinkle-free graphene based devices.
机译:石墨烯层可以用作金属氧化物半导体场效应晶体管的导电通道,电容器中的金属电极等,但是,当石墨烯通过化学气相沉积(CVD)生长时,底物诱导的波纹和相关的皱纹石墨烯层通过降低电导并提高其变化来侵蚀这些装置的性质。在这项工作中,已经使用不同的纳米级实验技术来研究不同基材上生长和转移的石墨烯片的形态。我们表明,通过产生皱纹,在扁平基板上的石墨烯片中的压缩菌株(来自生长过程),在粗基质上通过改善石墨烯 - 衬底粘附来最小化,导致皱纹的较低密度最小化。该方法允许设计无皱的石墨烯基装置。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号