Fluorinated Wastewater Abatement Method and Clean Production in Crystalline Silicon Photovoltaic Manufacturing

摘要

Fluoride emissions have strict rules to supervise for its poison to the human and environment. HF is used by the photovoltaic manufacturing industry in 3 manufacturing sections including high-purity polysilicon, silicon wafer and PV cell & module, which will generate fluoride waste. This paper focused on the fluoride emission in the waste water and the clean production of crystalline PV manufacturing. The fluoride generation processes and abatement method in the waste water, as well as the clean production of 3 manufacturing sections in crystalline PV manufacturing were analyzed. Abatement system is needed to remove the fluoride (F~-) generated by PV production and after treatment, the fluoride won't cause the water environmental problems. In high-purity polysilicon and wafer manufacturing, the fluoride emission amount depended on the manufacturing technique level and raw silicon material quality. Clean production is very important for the PV manufacturing development, which can make the PV industry double green. The research can lay the foundation for the environmental impact assessment and management of photovoltaic manufacturing industry in China.