In situ real time spectroscopic ellipsometry analysis of Ag nanoparticle layers for back contact reflector applications

摘要

In this study, RTSE measurements spanning the photon energy range of 0.75–6.50 eV are described in detail for Ag nanoparticle films. This is a broader spectral range than has been previously reported for such measurements, and enables a separation among the contributions due to interband transitions at high energy, intraband transitions at low energies, and nanoparticle plasmon polariton transitions at intermediate energies. The thickness parameters associated with the nucleating nanoparticle layer, as well as the bulk and surface roughness layers for the subsequent thin film growth process, are also reported and correlated with the behavior of the dielectric function components associated with the nucleating and bulk layers.