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Inkjet Masking for Industrial Solar Cell Processes

机译:用于工业太阳能电池过程的喷墨掩蔽

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Masking by inkjet printing has potential benefits for solar cell manufacturing by improving the conversion efficiency and production yield. In industry and on lab scale it has been shown that there are many applications for inkjet masking to improve the solar cell efficiency. These applications include honeycomb texturisation, selective emitter, plating of front side electrodes and using inkjet masking for low-cost rear-side patterning for back-contact cells. Key success factors for inkjet masking are its small feature size and high flexibility. Furthermore the contact-less print method is in line with the general trend towards thinner wafers to reduce the material costs. However, inkjet technology is initially developed for graphical printing, which has less demanding print reliability criteria. In the photovoltaic (PV) industry one malfunctioning nozzle in the inkjet printing system can result in significant decreased device performance or clear visual defects. Therefore the transition from graphical printing to solar cell production cannot be made without a significant improvement in reliability. In 2011 OTB Solar B.V. started the development of the PiXDRO JETx, a high volume industrial inkjet printing system (up to 2400 wafers/hour) which addresses inkjet masking as a first application. For this application a joint development with Oce Technologies targets to demonstrate an inkjet print reliability and accuracy which meets the standards for solar cell manufacturing. The use of self-diagnosing print heads of Oce, redundant print strategies and the automation from OTB Solar form the basis to combine high reliability with industrial throughput and the printing of fine structures with a drop placement accuracy of 7.5μm 3sigma.
机译:通过喷墨印刷的掩蔽通过提高转换效率和产量,对太阳能电池制造具有潜在的优势。在工业和实验室中,已经表明,喷墨掩模有许多应用来提高太阳能电池效率。这些应用包括蜂窝纹理,选择性发射极,前侧电极的电镀,以及用于低成本后侧图案的喷墨掩模,用于背接触电池。喷墨掩模的关键成功因素是其小的特征尺寸和高灵活性。此外,较少的接触式印刷方法符合较薄晶片的一般趋势,以降低材料成本。但是,喷墨技术最初是为图形打印开发的,这对印刷可靠性标准较低。在光伏(PV)行业中,喷墨印刷系统中的一个故障喷嘴可能导致器件性能或清晰的视觉缺陷显着降低。因此,在没有显着改善的可靠性的情况下,无法从图形印刷到太阳能电池产生的过渡。 2011年OTB Solar B.v.开始开发PIXDRO JETX,高批量工业喷墨印刷系统(最多2400晶圆/小时),该屏蔽作为第一个应用程序地址喷墨掩蔽。对于此应用,具有OCE技术的联合开发,旨在展示喷墨打印可靠性和准确性,满足太阳能电池制造标准。使用自诊断的OCE打印头,冗余的打印策略和OTB太阳能的自动化,可以将高可靠性与工业通量的基础以及滴加精度为7.5μm3sigma的掉落精度。

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