STUDY ON A 1D HOMODYNE ENCODER AND A NOVEL 2D HOMODYNE ENCODER

摘要

A 1D homodyne encoder is demonstrated, which has a periodic nonlinearity of ±10 pm when a home built phase meter based on fast ADCs together with off-line Heydemann correction are employed. A novel 2D encoder is put forward and preliminarily proved by the proof-of-principle experiment.