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NANOCOINING SUB-MICROMETER FEATURES

机译:纳米亚微米功能

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摘要

Nanocoining is a new process that could be used to mass produce large areas of nanostructured coatings economically. A diamond die was attached to a 1 KHz actuator which had an elliptical path that matched the die's velocity with the mold velocity. Equations were developed to define the shape of the elliptical tool-path and the actuator was calibrated to produce this shape. Alignment techniques were used to make the die parallel to the mold by rotating the die about two axes of rotation to within 0.01°. The indented nickel mold and replicates created using a UV curable epoxy were examined in an SEM and AFM and the results showed the mold was able to successfully transfer features to replicates. A 250 nm sub-wavelength indenter was used to produce features which could be suitable for anti-reflective applications. An experiment has been performed to nanocoin features onto the outside surface of a rotating cylinder to mimic an industrial manufacturing process and produce a mold which could test the roll transfer production of nanofeatures.
机译:纳米压铸是一种新工艺,可用于经济地批量生产大面积的纳米结构涂层。将金刚石模具连接到1 KHz致动器,该致动器具有使模具速度与模具速度匹配的椭圆形路径。开发方程式来定义椭圆形刀具路径的形状,并校准执行器以产生这种形状。通过将模具绕两个旋转轴旋转到0.01°以内,使用对齐技术使模具与模具平行。在SEM和AFM中检查了压痕的镍模具和使用UV固化环氧树脂制成的复制品,结果表明该模具能够成功地将特征转移到复制品中。 250 nm亚波长压头用于产生可能适合抗反射应用的特征。已经进行了将纳米硬币特征放置在旋转圆柱体外表面上的实验,以模仿工业制造过程并生产可以测试纳米特征的辊转移生产的模具。

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