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On influence of substrate compliance on delamination and buckling of coatings

机译:关于基材柔韧性对涂层分层和屈曲的影响

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Problems related to delamination of coatings from substrates and their buckling are widely investigated due to importance of the problem for application in industry, particularly in micro- and nano-electronics and biology. The problem was addressed by many authors by using both analytical and numerical approaches. Here the model is developed that treats the delaminated part of the coating as a plate with a special attention given to the boundary conditions, which are supposed in the form of the generalized elastic clamping, i.e. it is supposed that components of displacements and angle of rotation at the point of clamping are related to the acting total force and total moment by means of 3×3 matrix of elastic coefficients. Knowing the coefficients of this matrix allows determining parameters of buckling such as the critical stress, energy release rate due to further delamination, amplitude of buckling. A few variants of analytical models to determine the coefficients of this 3×3 matrix were considered and discussed. Both the cases of isotropic and anisotropic coating and substrate are considered. The solution for some matrix coefficients was obtained with the help of Fourier transform and Wiener-Hopf technique. On the base of the obtained solution it is shown that the difference between the obtained critical stress and the critical stress of a rigidly clamped plate can be defined by a single nondimensional parameter, which is a combination of the elastic constants of the coating and substrate, and the ratio of delamination length to coating thickness. The results correlate well with the results obtained using the FEM model.
机译:由于该问题对工业应用的重要性,特别是在微电子和纳米电子学和生物学中的应用,因此与该涂层从基材上脱层及其屈曲有关的问题得到了广泛的研究。许多作者通过分析和数值方法解决了这个问题。在此模型的开发过程中,将涂层的分层部分视为板,并特别注意边界条件,该边界条件假定为广义弹性夹紧的形式,即假定位移和旋转角度的分量通过3×3的弹性系数矩阵,在夹紧点处的作用力与作用的总力和总力矩有关。知道该矩阵的系数可以确定屈曲参数,例如临界应力,由于进一步分层引起的能量释放速率,屈曲幅度。考虑并讨论了确定该3×3矩阵系数的分析模型的一些变体。同时考虑了各向同性和各向异性涂层以及基材的情况。借助傅立叶变换和Wiener-Hopf技术获得了一些矩阵系数的解。根据所获得的解决方案,可以看出,所获得的临界应力和刚性夹紧板的临界应力之间的差异可以由单个无量纲参数定义,该参数是涂层和基材的弹性常数的组合,以及分层长度与涂层厚度之比。结果与使用FEM模型获得的结果非常相关。

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