Low Temperature Fabrication and UV Treatment of Spin Coated ZnO Films Using Partial Hydrolyzate of Diethylzinc Based Solutions

摘要

Low temperature fabrication of ZnO films using partial hydrolyzate of diethylzinc based solution were investigated. UV treatment was effective to improve the electronic performance of ZnO films. Group 13 element metals (Ga and In) compounds were mixed to our precursor solution and transparent multi-metal oxide films were obtained.