FABRICATION OF MICROCHANNELS BY STEREOLITHOGRAPHY FOR OPTICAL USE

摘要

In this paper the feasibility of obtaining optical access for micro devices made by stereolithography is investigated, to meet demands set by microfiuidic research efforts. A commercially available resin SL5530 was selected for the UV polymerisation process. By optimising the design of the CAD models and the fabrication process, the suitability of the final product was improved for optical metrology. Transparent T-shaped microchannels were manufactured for future application in gas mixing study on interferometric system. Fringes patterns were first obtained from interferometric experiments and then the signals were extracted from the fringes pattern to analyse its suitability.