Dielectric barrier discharge (DBD) plasma devices have been designed and manufactured with microscale dimensions utilizing semiconductor fabrication techniques. Particle image velocimetry (PIV) measurements indicate induced wall jet velocities up to 2.0 m/s. Direct force measurements using a torsional balance indicate thrust values up to 3 mN/m at 5 kV_(pp) and 1 kHz and consume an average power of 15 W/m. The measured thrust data is applied in a numerical model to compare simulated velocity flow fields with experimental PIV data. The model shows good agreement with experimental data for the velocity and wall jet thickness for macro device geometries, but inaccurately predicts the downstream velocity decay. Microscale devices demonstrated equivalent 'thrust effectiveness' to macroscale actuators, but with a 31% improvement in mechanical-to-electrical energy conversion efficiency. The microscale DBD actuators occupy an order of magnitude reduction in device footprint and mass, and potentially enable large arrays for distributed flow control applications.
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