Electric Conductive Si_3N_4/TiN Composite Ceramic Manufactured by Liquid-Qhase Sintering

摘要

Si_3N_4/TiN electric conductive ceramic was fabricated by liquid phase sintering using La_2O_3-AlN as sintering aid and TiN as conductive additives. The Si_3N_4 powder used was synthesized by SHS (self-propagation high-temperature synthesis) method. Mechanical property and electrical conductivity of the sintered samples with >96% density were studied. Microstructure and phase composition were analyzed by SEM and XRD respectively. The results show that the liquid phase plays role in densification. The ceramic contains two major phases of β-Sialon and TiN. β-Sialon grains show elongated and the conductive phase TiN granules form electric conductive network. This composite Si_3N_4/TiN has good mechanical properties and its electric resistivity is below 1 Ω·cm.