Micro and Nano Measurement Instruments

摘要

This paper presents micro and nano measurement instruments for ultra-precision machining. Optical sensors for measurement of angle and displacement are first described. Technologies for improvement of the sensor sensitivity and bandwidth, reduction of the sensor size as well as development of new multi-axis sensing methods are presented. The second half of the paper presents a number of scanning-type instruments for surface profile measurement. Technologies for reduction of scanning errors, automatic alignment of measuring positions, fast scanning mechanisms are addressed.