Development of a high acceleration magnetic bearing stage

摘要

Magnetic bearing stages have a great potential in the sense that active magnetic bearing enables a stage to have five degrees-of-freedom motion and ultra-low contamination. It comes at the cost of active control systems and relatively weak dynamic stiffness compared to that of fluidic bearings such as hydrostatic oil bearings and air bearings. While their functionality has been proven in many high precision motion control applications, stages with magnetic bearings seem to put more emphasis on accuracy rather than agility. We introduce our new development of a high acceleration magnetic bearing stage. The final goal is to obtain up to 5G (49 m/sec~2) from a magnetic bearing stage. To cope with high acceleration, our stage has a parallel mechanism to suppress residual vibration. The preliminary design, analysis, and experimental results will be presented and discussed.