Micro-nanostructural and composition characterization of ZnO: Al doped films by SEM-EDX and HRTEM-EDX

摘要

We present the results of a structural and compositional investigation of Al-doped thin films obtained by sol-gel deposition on Si/SiO2 substrates. Taking into consideration the layer by layer deposition process and that the films contain 1–10 successive layers, the evolution of structure and elemental composition, especially Al concentration in the films were investigated by energy dispersive X-ray analyses in the scanning and high resolution transmission electron microscopy. Qualitative composition of the structures observed in the films have been evidenced in the elemental maps.