Novel Printable AlOx Passivation Material and the Process Integration with Commercial Production Line for High Efficiency (20) PERC Solar Cells

摘要

The candidate of next generation solar cells, PERC-type solar cells, could not be generally mass produced until now partly because of the cost issue and the unpredicted demand of market. For those issues, we developed a new and economic deposition technique for AlOx layer by applying our novel material -"AlOx Passivation Paste" (IP1257) using screen printing which is a standard process/equipment available in all cell manufacturers. As a result, capital investment in high cost deposition equipment could be reduced significantly. Furthermore, after process integration and optimization with in-line production equipment, the average cell efficiency of 20.10 % and Voc of 0.654 V with highest conversion efficiency of more than 20.30 % in one batch of 2,774 standard Mono wafers (156 mm, pseudo square) have been achieved which could be attributed to the excellent rear side passivation quality by the IP1257-AlOx/SiNx stack. Finally, we believe that this technique could become an excellent solution and option for mass production of high efficiency PERC-type solar cells in the near future.