PLANAR METAL CONTACT AREAS FORMED WITH LASER ASSISTANCE - A NEW APPROACH IN LASER ABLATION FOR LOCAL FRONT-SIDE OPENINGS

摘要

In this paper we present our new approach in laser ablation for local front-side openings: planar metal contact areas formed with laser assistance in combination with wet chemical treatment. The benefits of this new process sequence are the generation of fine-lined and self-aligned metal contacts with high conductivity, the creation of buried contacts to reduce the shadow losses, and the possibility of forming a selective emitter (depending on the diffusion-barrier layer) without additional steps.