Integrating single-point vibrometer and full-field electronic speckle pattern interferometer to evaluate a micro-speaker

摘要

A testing system contains an advanced vibrometer/interferometer device (AVID) and a high-speed electronic speckle pattern interferometer (ESPI) was developed. AVID is a laser Doppler vibrometer that can be used to detect single-point linear and angular velocity with DC to 20 MHz bandwidth and with nanometer resolution. In swept frequency mode, frequency response from mHz to MHz of the structure of interest can be measured. The ESPI experimental setup can be used to measure full-field out-of-plane displacement. A 5-1 phase shifting method and a correlation algorithm were used to analyze the phase difference between the reference signal and the speckle signal scattered from the sample surface. In order to show the efficiency and effectiveness of AVID and ESPI, we designed a micro-speaker composed of a plate with fixed boundaries and two piezo-actuators attached to the sides of the plate. The AVID was used to measure the vibration of one of the piezo-actuators and the ESPI was adopted to measure the two-dimensional out-of-plane displacement of the plate. A microphone was used to measure the acoustic response created by the micro-speaker. Driving signal includes random signal, sinusoidal signal, amplitude modulated high-frequency carrier signal, etc. Angular response induced by amplitude modulated high-frequency carrier signal was found to be significantly narrower than the frequency responses created by other types of driving signals. The validity of our newly developed NDE system are detailed by comparing the relationship between the vibration signal of the micro-speaker and the acoustic field generated.