MICRO PATTERNING OF DIELECTRIC MATERIALS BY USING STEREO- LITHOGRAPHY AS GREEN PROCESS

摘要

Dielectric micro patterns composed of ceramic/resin composites were fabricated to control terahertz waves effectively by using stereolithography. In this process, the photosensitive resin paste with titania particles dispersion was spread on a substrate with 10 um in layer thickness by moving a knife edge, and two dimensional images of UV ray were exposed by using digital micro mirror device with 2 um in part accuracy. Through the layer by layer process, the periodic structures composed of micro polygon tablets were formed. The electromagnetic wave properties of these samples were measured by using a terahertz spectroscopic analyzer. The band gap formation and localization behavior of terahertz waves in dielectric micro patterns will be reported. The electromagnetic waves in a terahertz frequency range with micrometer order wavelength are expected to be applied for novel sensors to detect gun powders, drugs, bacteria in foods, micro cracks in electric devices, cancer cells in human skin. The extremely thin terahertz wave devices could be fabricated successfully by using non-heating green processes.