Nano-level 3-D shape measurement system using 3-wavelength LED light interference fringes

摘要

Nano-level 3-D measurement is one of the key technologies for the current and next generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, “Wide range nano-level 3-D shape measurement method using combination of RGB laser lights” has been developed. It measures the height of nano-objects from the combination of RGB LED lights combinations. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the micro-meter heights using RGB lightings has been developed, and succeeded to measure the 50 nm step and 500 nm step samples.