Modeling and Simulation for a Vibratory Tuning-fork MEMS Gyroscope

摘要

A vibratory tuning-fork MEMS gyroscope is presented in the study. Design concepts for the gyroscope are obtained by introducing the working principle, the suspension system, and the damping. The dynamical simulation is applied to indicate that this gyroscope has achieved high stability and sensitivity by the indirect connection structure and slide-film damping in the drive and sense directions. It is found that the novel structural design for the gyroscope can be seemed as a good approach to increase the performance of tuning-fork gyroscope.