We demonstrate high-speed silicon-based microring modulators and electro-optical switches which are integrated with grating couplers. Wafer-level measurements are set up for the devices characterizations without wafer cleaving and facet polishing. 10 Gbit/s NRZ modulation is realized under pre-emphasis driving signals. Switch on/off time of 300/380ps are demonstrated in the asymmetrical 1×2 microring switch with an add-drop crosstalk of -23dB.
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机译：我们演示了与光栅耦合器集成在一起的高速硅基微环调制器和光电开关。无需对芯片进行切割和刻面抛光，就可以对器件的特性进行晶圆级测量。在预加重驱动信号下可实现10 Gbit / s NRZ调制。在不对称的1×2微环开关中演示了300 / 380ps的开/关时间，其加减串扰为-23dB。
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