Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

摘要

AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized.Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere.High crystalline AlN was synthesized at over 900 °C.The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace.Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.