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Development of incoherent EUV/VUV light sources: Tailoring the output pulse characteristics for materials processing applications

机译:开发非相干EUV / VUV光源:针对材料加工应用定制输出脉冲特性

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The temporal characteristics of the output pulses generated by an excimer-based incoherent light source operating in the deep ultraviolet between 80nm<λ<160nm have been investigated in detail. Generation of output pulses with the highest peak powers, shortest durations (FWHM) and fastest leading-edge risetimes, occurred at the highest operating pressure studied (900mbar).
机译:详细研究了在80nm <λ<160nm之间的深紫外光下工作的基于准分子的非相干光源产生的输出脉冲的时间特性。在研究的最高工作压力(900mbar)下,产生了具有最高峰值功率,最短持续时间(FWHM)和最快前沿上升时间的输出脉冲。

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