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Temperature distribution dependence on refractory anode thickness in a vacuum arc

机译:真空电弧中温度分布与耐火阳极厚度的关系

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The time dependent anode temperature was measured in a hot refractory anode vacuum arc (HRAVA) sustained between a consumed water-cooled cylindrical Cu cathode and nonconsumed cylindrical W anodes with d=5, 10, 15, 20 and 30 mm thickness. Arc currents of I=130, 150, 175 and 200 A were applied for periods up to 210 s and an inter-electrode gap of 10 mm. The anode temperature was measured using high-temperature thermocouples at different points in the anode body. The visual radiation emitted by the plasma plume was recorded with a digital camera. The anode temperature increased with time, reaching a steady state value which slightly increased with arc current. When d was increased from 5 to 30 mm, the time for the anode front surface to reach the steady state increased from 40 to 140 s, while this temperature decreased from 2525 to 2325 K (I=175 A). Thus minimizing d advantageously minimizes the start-up transient when using the radially expanding HRAVA plasma plume for thin film deposition.
机译:时间依赖性阳极温度是在消耗的水冷圆柱形Cu阴极和厚度为d = 5、10、15、20和30 mm的未消耗圆柱形W阳极之间维持的热难熔阳极真空电弧(HRAVA)中测量的。施加I = 130、150、175和200 A的电弧电流的时间长达210 s,电极间间隙为10 mm。使用高温热电偶在阳极体内的不同点测量阳极温度。血浆羽流发出的可见辐射用数码相机记录。阳极温度随时间增加,达到稳态值,该值随电弧电流略有增加。当d从5 mm增加到30 mm时,阳极前表面达到稳态的时间从40 s增加到140 s,而该温度从2525 K降低到2325 K(I = 175 A)。因此,当使用径向扩展的HRAVA等离子羽流进行薄膜沉积时,最小化d有利于最小化启动瞬态。

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