Alumina photonic crystals with a diamond structure were fabricated to control terahertz waves by using micro stereolithography. Electromagnetic waves in a terahertz (THz) frequency range with micrometer order wavelength can be applied for various types of novel sensors. In the fabrication process, the photo sensitive resin paste with or without ceramic particles dispersion was spread on a grass substrate with 10 μm in layer thickness by using a mechanical knife edge, and two dimensional images of UV ray were exposed by using digital micro mirror device (DMD) with 2 μrn in part accuracy. Through the layer by layer stacking, micrometer order three dimensional structures were formed. Dense Alumina structures were obtained by successive dewaxing and sintering in an air atmosphere. The electromagnetic wave properties of the photonic crystals were measured by THz wave time domain spectroscopy (TDS). The micrometer order periodic structures exhibited perfect band gaps in THz frequency range. The plane defects in the lattice structures formed highly localized mode in the band gaps. The propagation and localization behaviors of THz waves were simulated by transmission line modeling (TLM) methods.
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