Micromachined acoustic device for diagnostic applications

摘要

Monolithic integrated lab-on-a-chip systems are gaining more and more attention. The ability of having everything on a single chip allows for miniaturization and flexibility. However, some of the currently applied devices are based on materials non-compatible with semiconductor processing techniques; in this paper, a micromachined device based on a high-quality semiconductor material is presented and evaluated for its potential to diagnostics.