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Micro grinding of structured ceramic mold - Accuracy improvement by truing of diamond wheel using molybdenum

机译:结构陶瓷模具的微研磨-通过使用钼修整金刚石砂轮来提高精度

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Demands of a micro structured glass lenses are increasing in a DVD pick-up and dark field systems for automobiles. The glass lenses are molded with a glass mold press with micro ceramics molds and dies, and then ultra-precision grinding technology of ceramic mold has become a core technology. In this study, authors have successfully developed the simultaneous 2-axiss (Y, Z) controlled grinding by using a diamond wheel having sharp edge, and it was clarified that ultra-precision micro fresnel mold could be ground using the sharp diamond wheel. Furthermore, in order to improve the mold form accuracy, a new truing method using a truer made of molybdenum alloy is proposed and the effects of the molybdenum truer are tested. Finally, the micro diamond wheel was trued by the new truing method, and the aspherical molds made of ceramics such as tungsten carbide and glassy carbon for fresnel glass lens of infrared DOE were ground to evaluate grinding performances. From the experimental results, it is clarified that diamond wheel having sharp edge can be trued on the machine and generated by the molybdenum alloy, and the precision accuracy of 0.1 μmP-V and surface roughness of 3nmRa were obtained in grinding.
机译:在用于汽车的DVD拾取和暗场系统中,对微结构玻璃透镜的需求正在增长。玻璃镜片是用带有微陶瓷模具和模具的玻璃模具压模成型的,然后陶瓷模具的超精密磨削技术已成为一项核心技术。在这项研究中,作者已经成功地开发了使用具有锋利边缘的金刚石砂轮同时进行两轴(Y,Z)控制的磨削,并且澄清了可以使用锋利的金刚石砂轮磨削超精密微菲涅耳模具。此外,为了提高模具成型精度,提出了一种使用由钼合金制成的整平器的整形方法,并测试了整整钼器的效果。最终,通过新的修整方法对微型金刚石砂轮进行了修整,并研磨了由陶瓷制成的非球面模具,例如碳化钨和玻璃碳制成的红外DOE菲涅尔玻璃透镜,以评估研磨性能。从实验结果可以看出,具有锋利边缘的金刚石砂轮可以在机器上修整并由钼合金产生,并且在研磨中获得0.1μmP-V的精度和3nmRa的表面粗糙度。

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