A new ultra-precision micro texturing method for difficult-to-cut materials is proposed in the present research. In the proposed method, elliptical vibration cutting is utilized, which enables active control of depth of cut by controlling vibration amplitude in the thrust direction. A high-speed control system of the vibration amplitude with a bandwidth of more than 300 Hz is developed, which can control the vibration within an amplitude of 4 μm_(p-p). The developed control system is applied to ultra-precision micro texture grooving and sculpturing of hardened steel with single crystal diamond tools. It is confirmed that the textured grooves and the sculptured surfaces have desired shapes successfully, whose profiles agree well with the vibration amplitude command input to the control system.
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