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Optical Roughness Measurement - Simulation and Application of a Scattered Light Measuring Process

机译:光学粗糙度测量-散射光测量过程的仿真和应用

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摘要

A fast and compact optical measuring device determines the roughness of specularly reflecting, possibly anisottopic surface topographies. It is suitable for in-process applications and enables an economically improved production. The mathematical description of the scattered light measuring process is based on ray tracing and the scalar Kirchhoff theory. This contribution mainly covers the theory of beam propagation in a fiber optical element producing a static surface illumination pattern.
机译:快速而紧凑的光学测量设备可确定镜面反射(可能是同位素表面形貌)的粗糙度。它适用于过程中的应用,并可以经济地提高产量。散射光测量过程的数学描述基于光线追踪和标量基尔霍夫理论。该贡献主要涵盖光束在产生静态表面照明图案的光纤元件中传播的理论。

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