Study on the Quadrature Error under Varying Ambient Pressure for a Bulk Micromachined Z-axis Gyroscope

摘要

This paper focused on the study of the quadrature error for a bulk micromachined gyroscope under varying pressure conditions between 150Pa and 100kPa. The source of the quadrature error and the non-ideal model of the micromachined gyroscope are presented with details. The change trend and characterization of pressure dependence were analyzed both analytically and experimentally in the custom-built installation. The results indicated that in order to meet high resolution and stabilization of the quadrature error,the optimal working pressure applied to the gyroscope must limit to a certain boundary condition. At last,some effective methods of restraining the quadrature error were put forward.