PVD Platform for Plasma Based Deposition for High End Coatings: Road Runner

摘要

A new PVD coating platform was developed for internal use in the Ionbond group. Key requirements of the platform were; flexibility in coating type, flexibility in deposition mode, and productivity. This resulted is a single skid PVD coating platform which can deposite up to 6 materials at a temperature up to 500 degree C. The PVD coating platform can be equipped with rectangular or round cathodes in both arc and sputter configuration, depending on the coating requirements. The productivity is extremely high; cycle times of 4 hrs and up to 6 batches/day, for the latest high end nano-crystalline cutting tools coatings (AlTiN and TiSiN).