Development of measurement standard with random surface topography for areal surface texture measuring instruments

摘要

This study deals with development of measurement standard with randomly distributed surface irregularities for calibration and verification of areal surface texture measuring instruments by use of an ultra-precision milling machine. The surface geometry data for the measurement standard and the corresponding cutter location data for ball end mill with excessively small tip radius were generated through the non-causal 2D auto-regressive stochastic model. The cross feed pitch for machining and sampling spacing for profile measurement were determined with a consideration of cusp volume and autocorrelation curve of surface profile to be measured. The discrepancy between generated original surface data and measured surface topography data for machined measurement standard was judged by means of representative areal surface texture parameters.