The paper presents a framework of a surface characterisation system for structured freeform surfaces such as micro-lens array, pyramids, etc. A pattern analysis method based on power spectrum analysis is proposed to recognize the errors and defects contained in these data sets into error and defect types, and the typical feature parameters are established for each identified error and defect type (scale, amplitude, etc.) and their values. The relationships between the features of different errors and defect types of the micro-lens array are also discussed.
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