ELECTRON KINETICS IN DISCHARGE PLASMA IN XENON AND HELIUM, NEON AND XENON MIXTURES

摘要

The code of numerical solution of the Boltzmann equation in stationary and non-stationary local approximations of the EEDF was developed. Influence of electron-electron collisions, super-elastic collisions of electrons with xenon atoms and the stepwise ionization on the EEDF, mean electron energy, transfer coefficients and rate constants of inelastic electron collisions with atoms in xenon and in mixtures of He/Xe, Ne/Xe was investigated. In addition, influence of Xe percentage in He/Ne/Xe plasma on the EEDF, mean electron energy, transfer coefficients, rate constants and distribution of electron energy losses were analyzed.