Adaptive vibration-resistant techniques in interferometry base on single-point phase-detecting

摘要

Active vibration-resistant techniques for interferometer are gradually applied to eliminate the effects of environmental disturbance, the mechanic-electronic feedback method is one of the low-cost easy way to fulfill these techniques. The detection of vibration signal is the key part of this method, in this case, a single photodiode is used to detect optical phase of the interference field in order to obtain the vibration signal. Optoelectronic signals concerning with vibration are digitalized and analyzed by DSP, and then a feedback voltage is produced to PZT phase shifter which can compensate the change of optical path difference due to vibration. The principles of each part of this vibration-resistant system are described in detail including the design of electronic processing. Experimental results indicates that this method is an effective way to control the vibration with amplitude-frequency product less than 100 wave~*Hz.