Design of a coherent optical interferometric system

摘要

A 100-mm-aperture high lateral resolution interferometer has been developed in Fine Optical Engineering Research Center (FOERC), which is applied to the measurement of spatial frequencies of up to 2.5lines/mm over a 100mm field of view. The system transfer function of the interferometer is greater than 60% at near half the Nyquist frequency. To demonstrate the performance o f this high lateral resolution interferometer, theoretical errors of the system are thoroughly analyzed and the design implementation is carefully studied, such as light source, wave front slope, tolerance analysis, CCD sample and so on.