THE APPLICATION OF BESSEL FUNCTION METHODS ON HIGH FREQUENCY VIBRATION CALIBRATION

摘要

Bessel function methods are used on high-frequency vibration calibration. In this paper, a general principle, devices, methods and uncertainty evaluations will be introduced. There are four methods based on Bessel function, which include J_0 minimum-point method, J_1 minimum-point method, J_1 ratio method and J_1/J_3 ratio method. About this calibration system, the frequency range is (2～50) kHz and the displacement range is (0.002～0.2) μm. At the same time, two important things will be described, one is a frequency-adjustable piezoelectricity vibrator which is good for high-frequency vibration calibration on account of almost no equilibrium excursion, and the other is double-holes method used in evaluating the linearity of laser interferometer which is important for calibration.