FABRICATION OF Ni-W ELECTROPLATED MICRO DIAMOND GRINDING TOOLS AND THEIR APPLICATION TO GROOVING IN SILICON

摘要

Ni-W electroplated micro diamond grinding tools with cylindrical carbide substrate having a diameter of 100 μm were fabricated in ammonium citrate bath with the intention of improving the grain holding and the tool life. The comparison of these tools with Ni electroplated tools in tool life shows that the former are superior to the latter. The optimum conditions for current density and time of electroplating were obtained from the viewpoint of tool life in grooving of silicon.