Frequency-temperature Characteristics for Doubly Rotated Tuning Fork Quartz Temperature Sensor

摘要

In order to obtain a sensor having an excellent sensitivity, short response time and low power consumption, a new cut ZYtw(-115°/-15°) of quartz tuning-fork temperature sensor is designed by using the finite element analysis, which is shown that this works best at the flexural vibration mode with optimizing the first, second and third order frequency temperature coefficients. Moreover investigations of the frequency-temperature characteristics of quartz temperature sensor with the flexural vibration mode are carried out and measurements of the vibration frequencies are performed over a wide temperature range from -100 to 160°C. Experimental results indicate that the first temperature coefficients of frequency can be reached -58.2 x 10~(-6) K~(-1), and the second- and third-order temperature coefficients of frequency are 26.78 x 10~(-9) K~(-2), -3.04 x 10~(-12) K~(-3) by employing the least squares method from the frequency-temperature characteristics of the sensor. The results of the theoretical values and experimental investigation show that it is possible to construct an excellent thermosensitive quartz sensor.