UV-laser-assisted fabrication of dispersive structures in polymeric integrated-optical components

摘要

In this article the fabrication of grating structures in the surface of planar polymer chips by the phase mask method is discussed. By this way surface relief gratings (SRG) and bragg-structures can be generated by UV-laser irradiation. Especially the topographical surface properties of the gratings have been examined. Potential applications are the field of optical sensor and information technology.