HAFNIUM OXIDE: A NEW SENSITIVE MATERIAL FOR DETECTION OF CARBON MONOXIDE

摘要

Hafnium oxide thin films have been prepared by means of a dual ion beam sputtering system. Structural and compositional characterization was performed by means of X-ray diffraction and XPS techniques, respectively. A mixture of amorphous and polycrystalline structure and a substoichiometric composition were found. The AFM analysis have shown a morphology with a high density of holes probably due to the deposition process. In addition the gas sensing characteristics were also analyzed in presence of carbon monoxide. The variations of the electrical properties have shown the capability of the films to detect CO and then the possibility to use hafnium oxide as a new sensitive material in the field of gas sensors.