A smooth surface finish of approximately 0.3nm in RMS is required to reflect SOR rays effectively in the study of molecular biology and micro-machining of semiconductors. Achievement of such surface smoothness was difficult in conventional ceramics because of the crystalline size and/or direction irregularities. In this situation, the authors succeeded in producing reflective mirrors up to 1000mm for SOR rays by applying the CVD-SiC coating technology with high oriented β -SiC(220) face developed in our previous study through, and the combination of the newly developed ultraprecision polishing described in this paper.
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